Analysis and Design of Stiffness of the Elastic Beam in Linear Vibration MEMS Gyroscope

At present, the linear vibration gyroscope is a major research of micro-mechanical gyroscopes. According to the working principle of the linear vibration gyro, in order to enhance its sensitivity, it is demanded that its driven model natural frequency and detection model natural frequency should be close. Thus, according to the gyroscope structure, it is required that the stiffness coefficients of the two models should be into a certain proportion. The stiffness coefficients of the models are mainly decided by the rigidity of the elastic beam, therefore, the design of stiffness of the elastic beam will directly affect the gyro performance. In this paper, the analytical formula for calculating the stiffness of the elastic beam, which is commonly used in linear vibration MEMS gyro, is derived by using the energy method. Then the elastic beams are designed based on the formula, and the design is reasonable verified by simulation and experimental comparison.