Title :
Organic/inorganic hybrid gate dielectric for high-performance and low-power organic thin-film transistors
Author :
Shin, Woo Cheol ; Moon, Hanul ; Yoo, Seunghyup ; Cho, Byung Jin
Author_Institution :
Dept. of Electr. Eng., KAIST, Daejeon, South Korea
Abstract :
High-performance and low-voltage OTFTs have been demonstrated by employing a multilayer dielectric structure where ultrathin PVP (8 nm) is coated on top of high-κ HfLaO (20 nm). The multilayer dielectric exhibited a low leakage current density of 4.6×10-8 A/cm2 at -3 V while maintaining a high capacitance density of 340 nF/cm2. The device with the multilayer dielectric showed superior performance as compared to that of the device with single HfLaO (20 nm) dielectric such as a low threshold voltage (VT) of 0.5 V, a low subthreshold slope (SS) of 0.09 V/decade, a high on-off current ratio (Ion/Ioff) of 5×105 and a saturation mobility (μSAT) of 0.34 cm2V-1s-1 along with a low operating voltage of -2 V. Due to the enhanced μSAT with the high gate capacitance of the device with multilayer dielectric, we also achieved a high μSATCox of 114 nF/Vs, thereby leading to superior drain current drivability.
Keywords :
carrier mobility; current density; low-power electronics; organic semiconductors; thin film transistors; high performance organic thin-film transistors; low leakage current density; low power organic thin-film transistors; multilayer dielectric structure; on-off current ratio; organic/inorganic hybrid gate dielectric; saturation mobility; superior drain current drivability; OTFT; high-k; hybrid dielectric; low-power; mobility;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-7033-4
Electronic_ISBN :
1944-9399
DOI :
10.1109/NANO.2010.5697845