variable frequency microwave excited plasma

Summary form only given, as follows. This paper reports on the use of an agile frequency source in generating plasma. A traveling wave tube (TWT) provides approximately one octave bandwidth and variable power level up to 2 KW. By controlling the frequency, efficient coupling to the load (materials and/or plasma) can be maintained even as the load is changing in properties or position. Furthermore, the variable frequency power source allows the localization of the plasma discharge in precise areas of interest to specific processes. The excitation frequencies can be continuously swept to scan the plasma across an arbitrary-shaped target surface. Plasma generation and position control is reviewed and experimental results on variable frequency microwave excited plasma are presented.