Micromachined planar probe using half-SIW and half-shielded stripline structure for permittivity measurement

This paper reports on a micromachined planar type probe based on a novel hybrid shielded stripline. The proposed structure is for a broadband transverse electromagnetic (TEM) single-mode propagation using substrate integrated waveguide (SIW) and conventional shielded stripline. We suggested a novel probe structure that composed of half-SIW and half-shielded stripline, which combined through a benzocyclobutene (BCB) bonding layer. The structural concept and simple fabrication method has been introduced, and the S₁₁ in air was measured from 0.5 GHz to 30 GHz. The permittivity measurement of 0.9 % saline has been performed to validate the proposed structure at frequencies from 0.5 GHz to 20 GHz.