Title :
MEMS, microsystems and nanosystems
Author_Institution :
Dept. of Electr. & Comput. Eng., George Washington Univ., DC, USA
Abstract :
This paper reviews recent microfabrication techniques with applications to MEMS, and microsystems. Examples of MEMS devices are presented and their applications to RF-communications are discussed, along with new emerging technologies and their impact on future devices and future architectures.
Keywords :
micromachining; micromechanical devices; nanotechnology; radiocommunication; MEMS; RF-communications; future architectures; future devices; microfabrication techniques; micromachining; microsystems; nanosystems; Biomedical engineering; Medical diagnostic imaging; Microelectromechanical devices; Micromachining; Micromechanical devices; Nanobioscience; Nanotechnology; Optical fiber networks; Optical resonators; Surgery;
Conference_Titel :
Cellular Neural Networks and Their Applications, 2002. (CNNA 2002). Proceedings of the 2002 7th IEEE International Workshop on
Print_ISBN :
981-238-121-X
DOI :
10.1109/CNNA.2002.1035089
