DocumentCode :
2287597
Title :
Synchrotron X-ray micro-analysis of epitaxial film grown on buffer layer boundary
Author :
Kim, Chang-Yong
Author_Institution :
Canadian Light Source Inc., Saskatoon, SK, Canada
fYear :
2010
fDate :
17-20 Aug. 2010
Firstpage :
582
Lastpage :
585
Abstract :
Ti-doped α-Fe2O3 (hematite) film grown on α-Al2O3(0001) with structured α-Cr2O3 buffer layer was characterized with synchrotron X-ray microdiffraction and fluorescence spectroscopy. Despite of a large lattice mismatch, epitaxial α-Fe2O3 film was formed on α-Al2O3 bare substrate adjacent to the buffer through mechanism similar to side-wall epitaxy. On bare substrate distant from the buffer only a small portion of film was epitaxial either as coherent to the substrate or strain-relaxed form. The film adjacent to the buffer can be used to fabricate buffer-free epitaxial film attached on a large lattice mismatch substrate.
Keywords :
X-ray analysis; X-ray fluorescence analysis; buffer layers; epitaxial layers; iron compounds; optical films; synchrotron radiation; titanium; Al2O3; Cr2O3; Fe2O3:Ti; X-ray microdiffraction; buffer layer boundary; epitaxial film; fluorescence spectroscopy; hematite; lattice mismatch substrate; synchrotron X-ray micro-analysis;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
Conference_Location :
Seoul
ISSN :
1944-9399
Print_ISBN :
978-1-4244-7033-4
Electronic_ISBN :
1944-9399
Type :
conf
DOI :
10.1109/NANO.2010.5697927
Filename :
5697927
Link To Document :
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