Title :
Tunable RF MEMS microinductors for future communication systems
Author :
Tassetti, C.-M. ; Lissorgues, G. ; Gilles, J.P.
Author_Institution :
ESIEE Group, Noisy-Le-Grand, France
Abstract :
Tunable microinductors; can be designed controlling the magnetic coupling coefficient. This paper presents the design and fabrication of a new tunable RF MEMS microinductor. This component requires electrostatic actuators to control the inductance value. We report a 50% inductance variation from 1.5 to 5GHz measured on test wafers. A method to compute the inductance variation due to the mechanical displacement is briefly described. A compact lumped element model, based on the geometry, gives results in good agreement with measurements in the RF frequency range.
Keywords :
coupled circuits; electromagnetic coupling; electrostatic actuators; equivalent circuits; inductance; inductors; micromachining; silicon-on-insulator; 1.5 to 5 GHz; SOI wafer; anodic bonding; compact lumped element model; design; electrostatic actuators; equivalent circuit; fabrication; inductance; magnetic coupling coefficient; mechanical displacement; shunt-circuit configuration; transformer equations; tunable RF MEMS microinductors; Communication system control; Couplings; Electrostatic actuators; Electrostatic measurements; Fabrication; Inductance measurement; Radiofrequency microelectromechanical systems; Semiconductor device modeling; Solid modeling; Testing;
Conference_Titel :
Microwave and Optoelectronics Conference, 2003. IMOC 2003. Proceedings of the 2003 SBMO/IEEE MTT-S International
Print_ISBN :
0-7803-7824-5
DOI :
10.1109/IMOC.2003.1244918
