• DocumentCode
    2290637
  • Title

    An on chip signal processing and Fabry-Perot sensor using multi-slopes architecture

  • Author

    Ahmadi, Shahrokh ; Zaghloul, Mona

  • Author_Institution
    Dept. of Electr. & Comput. Eng., George Washington Univ., DC, USA
  • Volume
    2
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    722
  • Abstract
    In this paper, a Fabry-Perot based optical smart sensor and some of its advantages and applications are discussed. Basics of optical sensors and tight intensity modulations, with regard to the smart sensor, are discussed. The CMOS/MEMS implementation and fabrication of a Fabry-Perot sensor and it´s companion photodiode are shown. This companion photodiode of Fabry-Perot converts the filtered light intensity into an electrical signal. A CMOS integrated circuit is designed for the signal conditioning and processing of photodiode electrical signal. Using the CMOS integrated circuit, the analog signal is converted into a digital form and is available in an 8-bit bus for further processing
  • Keywords
    CMOS integrated circuits; Fabry-Perot interferometers; intelligent sensors; micro-optics; microsensors; optical modulation; optical sensors; 8 bit; CMOS integrated circuit; CMOS/MEMS implementation; Fabry-Perot sensor; filtered light intensity; multi-slopes architecture; on chip signal processing; optical smart sensor; photodiode; signal conditioning; tight intensity modulations; CMOS integrated circuits; Fabry-Perot; Intelligent sensors; Intensity modulation; Optical filters; Optical modulation; Optical sensors; Optical signal processing; Photodiodes; Signal processing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems, 2001. MWSCAS 2001. Proceedings of the 44th IEEE 2001 Midwest Symposium on
  • Conference_Location
    Dayton, OH
  • Print_ISBN
    0-7803-7150-X
  • Type

    conf

  • DOI
    10.1109/MWSCAS.2001.986289
  • Filename
    986289