• DocumentCode
    2291004
  • Title

    Investigation of bias-dependent series resistances and barrier height in Double Gate Schottky MOSFETs

  • Author

    Bhandari, Jyotshna ; Vinet, Maud ; Poiroux, Thierry ; Sallese, Jean Michel ; Previtali, Bernard ; Deleonibus, Simon ; Ionescu, Adrian M.

  • Author_Institution
    CEA-LETI, Minatec, Grenoble, France
  • fYear
    2009
  • fDate
    5-8 Oct. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    This work reports on gate voltage dependent source and drain series resistance and associated barrier height in modified double gate Schottky MOSFETs with dopant segregation. We show that in our devices the series resistances is significantly reduced by lowering the Schottky barrier height (SBH). The series resistance and the barrier have been extracted using an external series resistance method and Arrhenius plots, respectively. Series resistances as low as 400 Omega.mum for VG>VT and SBH of 0.1 eV at VG=VT, are reported Finally, this paper points our the correlation of RT(VG) and PhiB(VG) in DG Schottky MOSFETs and the importance of the simultaneous extraction and modeling.
  • Keywords
    Ge-Si alloys; MOSFET; Schottky barriers; Schottky gate field effect transistors; contact resistance; hafnium compounds; impurity distribution; segregation; semiconductor doping; semiconductor materials; titanium compounds; Arrhenius plot; Schottky barrier height; SiGe-TiN-HfO2; bias dependence; dopant segregation; double gate Schottky MOSFET; drain series resistance; electron volt energy 0.1 eV; external series resistance method; gate voltage dependence; metal-oxide-semiconductor field effect transistor; source series resistance; Electrical resistance measurement; Fabrication; Germanium silicon alloys; MOSFETs; Rapid thermal annealing; Schottky barriers; Silicon germanium; Tin; Tunneling; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, 2009 IEEE International
  • Conference_Location
    Foster City, CA
  • ISSN
    1078-621X
  • Print_ISBN
    978-1-4244-4256-0
  • Electronic_ISBN
    1078-621X
  • Type

    conf

  • DOI
    10.1109/SOI.2009.5318738
  • Filename
    5318738