DocumentCode
2291004
Title
Investigation of bias-dependent series resistances and barrier height in Double Gate Schottky MOSFETs
Author
Bhandari, Jyotshna ; Vinet, Maud ; Poiroux, Thierry ; Sallese, Jean Michel ; Previtali, Bernard ; Deleonibus, Simon ; Ionescu, Adrian M.
Author_Institution
CEA-LETI, Minatec, Grenoble, France
fYear
2009
fDate
5-8 Oct. 2009
Firstpage
1
Lastpage
2
Abstract
This work reports on gate voltage dependent source and drain series resistance and associated barrier height in modified double gate Schottky MOSFETs with dopant segregation. We show that in our devices the series resistances is significantly reduced by lowering the Schottky barrier height (SBH). The series resistance and the barrier have been extracted using an external series resistance method and Arrhenius plots, respectively. Series resistances as low as 400 Omega.mum for VG>VT and SBH of 0.1 eV at VG=VT, are reported Finally, this paper points our the correlation of RT(VG) and PhiB(VG) in DG Schottky MOSFETs and the importance of the simultaneous extraction and modeling.
Keywords
Ge-Si alloys; MOSFET; Schottky barriers; Schottky gate field effect transistors; contact resistance; hafnium compounds; impurity distribution; segregation; semiconductor doping; semiconductor materials; titanium compounds; Arrhenius plot; Schottky barrier height; SiGe-TiN-HfO2; bias dependence; dopant segregation; double gate Schottky MOSFET; drain series resistance; electron volt energy 0.1 eV; external series resistance method; gate voltage dependence; metal-oxide-semiconductor field effect transistor; source series resistance; Electrical resistance measurement; Fabrication; Germanium silicon alloys; MOSFETs; Rapid thermal annealing; Schottky barriers; Silicon germanium; Tin; Tunneling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 2009 IEEE International
Conference_Location
Foster City, CA
ISSN
1078-621X
Print_ISBN
978-1-4244-4256-0
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2009.5318738
Filename
5318738
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