DocumentCode
2291187
Title
Modeling of electron tunneling in SOI-MOSFET and its influence on device characteristics
Author
Hayashi, T. ; Sadachika, N. ; Murakami, T. ; Sugiyama, D. ; Yukuta, S. ; Kusu, S. ; Johguchi, K. ; Miyake, M. ; Mattausch, H.J. ; Miura-Mattausch, M. ; Baba, S. ; Ida, J.
Author_Institution
Hiroshima Univ., Higashi-Hiroshima, Japan
fYear
2009
fDate
5-8 Oct. 2009
Firstpage
1
Lastpage
2
Abstract
It is known that the electron tunneling from the valence band (EVB) is enhanced for SOI-MOSFETs with low Vds bias. We have modeled this phenomenon based on the surface-potential description. Our model considers the hole storage, which changes the potential distribution in the substrate. With the developed model it is demonstrated that the EVB effect can be predicted for any measurements accurately. The stored charge results in a 1/f noise enhancement at the same time, which is also well predicted.
Keywords
1/f noise; MOSFET; semiconductor device models; silicon-on-insulator; tunnelling; valence bands; 1/f noise; SOI-MOSFET; electron tunneling; hole storage; surface-potential description; valence band; Electrons; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 2009 IEEE International
Conference_Location
Foster City, CA
ISSN
1078-621X
Print_ISBN
978-1-4244-4256-0
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2009.5318746
Filename
5318746
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