Title :
Design and fabrication of SOI-based MEMS for mechanical memory storage
Author :
Parent, A. ; Tassetti, C.-M. ; Haussy, J. ; Tissot, A.
Author_Institution :
CEA, DAM, Arpajon, France
Abstract :
This paper presents the design and fabrication of SOI-based MEMS for mechanical memory storage (theoretical analysis and FEM) dedicated to reliability irradiative study. The memory data is the position of a mechanical ldquobi-stablerdquo. The data is written with thermal actuators and read with electrostatic comb electrodes.
Keywords :
actuators; electrodes; finite element analysis; micromechanical devices; reliability; silicon-on-insulator; FEM; SOI-based MEMS design; SOI-based MEMS fabrication; electrostatic comb electrodes; mechanical bistable position; mechanical memory storage; reliability irradiative study; theoretical analysis; thermal actuators; Electrodes; Electrostatic actuators; Extremities; Fabrication; Memory; Microelectromechanical devices; Micromechanical devices; Reliability theory; Shape; Switches;
Conference_Titel :
SOI Conference, 2009 IEEE International
Conference_Location :
Foster City, CA
Print_ISBN :
978-1-4244-4256-0
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2009.5318777
