Title :
Via-adjusted microstrip launch for sub-terahertz wafer probing
Author :
Kooho Jung ; Ebner, John
Author_Institution :
Cascade Microtech Inc., Beaverton, OR, USA
Abstract :
A new design for a microstrip launch is proposed to improve the measurement repeatability at sub-THz frequencies. Performance improvement is achieved by adjusting the ground vias´ position to the rear of the launch by which it becomes less sensitive to probe-tip placement compared to conventional launches using microstrip or co-planer waveguides. The investigation was done using HFSS, 3-D finite-element-method based electromagnetic simulation software, with tight convergence criteria to meet the required tolerances. The proposed design can be applied to other RF interfaces that required high repeatability such as pads for wire-bonds and footprints for surface-mount components, without increasing cost or compromising RF performance.
Keywords :
coplanar waveguides; finite element analysis; lead bonding; vias; wafer bonding; 3D finite-element-method; HFSS; coplanar waveguides; electromagnetic simulation software; ground vias position; measurement repeatability; microstrip waveguides; subterahertz wafer probing; surfacemount components; via-adjusted microstrip launch; wire bonds; Calibration; Coplanar waveguides; Frequency measurement; Microstrip; Probes; Radio frequency; HFSS; coplanar-waveguide; launch; microstrip; probe; sub-THz; via;
Conference_Titel :
Microwave Measurement Conference (ARFTG), 2014 84th ARFTG
Conference_Location :
Boulder, CO
DOI :
10.1109/ARFTG.2014.7013409