Adaptive estimation of complex calibration residual errors of wafer-level S-parameters measurement system

This article presents a method for determining complex residual errors of calibrated two-port vector network analyzers. It utilizes the time-domain technique. Calibration residual errors are extracted from a distance-frequency system model using a special estimation algorithm based on the quasioptimal unscented Kalman filter. Because the method requires only three measurement conditions, it is in particular beneficial for on-wafer applications, as three test conditions can be obtained from using only one transmission line. Moreover, the length of the line can be relatively short. Experimental studies were performed and verified the proposed method.