Title :
MEMS Mirror Controlling System with Holed-PSD
Author :
Fujita, Takayuki ; Nagatani, Yoshiharu ; Maenaka, Kazusuke
Abstract :
In this study, we developed a precise 2D MEMS (Micro Electro Mechanical Systems) mirror control system. The system comprises a two-sided mirror and rectangular shaped springs that fabricated on a silicon-on-insulator (SOI) wafer. The mirror movement is detected by a specialized holed position sensitive device (H-PSD), and is proportional-integral derivative (PID) controlled by a microcontroller (MCU). We also discuss an application of an optical laser projector that can depict an arbitral figures on the screen.
Keywords :
microfabrication; micromirrors; silicon-on-insulator; MEMS mirror controlling system; holed position sensitive device; optical laser projector; precise 2D MEMS; proportional-integral derivative; rectangular shaped springs; silicon-on-insulator wafer; two-sided mirror; MCU; MEMS; angle control; holed PSD; optical mirror;
Conference_Titel :
Emerging Trends in Engineering and Technology (ICETET), 2010 3rd International Conference on
Conference_Location :
Goa
Print_ISBN :
978-1-4244-8481-2
Electronic_ISBN :
2157-0477
DOI :
10.1109/ICETET.2010.101
