DocumentCode
2295384
Title
MEMS Mirror Controlling System with Holed-PSD
Author
Fujita, Takayuki ; Nagatani, Yoshiharu ; Maenaka, Kazusuke
fYear
2010
fDate
19-21 Nov. 2010
Firstpage
446
Lastpage
449
Abstract
In this study, we developed a precise 2D MEMS (Micro Electro Mechanical Systems) mirror control system. The system comprises a two-sided mirror and rectangular shaped springs that fabricated on a silicon-on-insulator (SOI) wafer. The mirror movement is detected by a specialized holed position sensitive device (H-PSD), and is proportional-integral derivative (PID) controlled by a microcontroller (MCU). We also discuss an application of an optical laser projector that can depict an arbitral figures on the screen.
Keywords
microfabrication; micromirrors; silicon-on-insulator; MEMS mirror controlling system; holed position sensitive device; optical laser projector; precise 2D MEMS; proportional-integral derivative; rectangular shaped springs; silicon-on-insulator wafer; two-sided mirror; MCU; MEMS; angle control; holed PSD; optical mirror;
fLanguage
English
Publisher
ieee
Conference_Titel
Emerging Trends in Engineering and Technology (ICETET), 2010 3rd International Conference on
Conference_Location
Goa
ISSN
2157-0477
Print_ISBN
978-1-4244-8481-2
Electronic_ISBN
2157-0477
Type
conf
DOI
10.1109/ICETET.2010.101
Filename
5698366
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