Title :
A TE011+δ mode sapphire resonator probe for accurate characterization of microwave surface resistance of HTS thin films
Author :
Lu, Jian ; Ren, Xiangyang ; Zhang, Qishao
Author_Institution :
Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
A special TE011+δ mode sapphire resonator and an equivalent perfect conductor calibration technique were developed to measure the surface resistance Rs of a single piece of HTS thin film non-destructively at 10 GHz and 77 K. The resonator is formed by a permanent probe and a replaceable test sample. The probe has Q-factor greater than 280000-good sample load repeatability and sensitivity about 20 μΩ for HTS samples under test with dimension equal to or greater than φ28 mm. The calibration employs a symmetric configuration which presents an equivalent Rs of zero ohm and ensures the accuracy of the measurement. The measured Rs data of YBCO thin films made by laser ablation and magnetic sputtering are less than 250 μΩ
Keywords :
barium compounds; calibration; dielectric resonators; high-temperature superconductors; microwave measurement; pulsed laser deposition; sputtered coatings; superconducting thin films; surface conductivity; yttrium compounds; 10 GHz; 77 K; HTS thin films; Q-factor; TE011+δ mode sapphire resonator probe; YBaCuO; YBaCuO thin films; calibration; characterization; laser ablation; magnetic sputtering; microwave surface resistance; sensitivity; symmetric configuration; Calibration; Conductive films; Electrical resistance measurement; High temperature superconductors; Nondestructive testing; Probes; Sputtering; Surface resistance; Tellurium; Transistors;
Conference_Titel :
Singapore ICCS '94. Conference Proceedings.
Print_ISBN :
0-7803-2046-8
DOI :
10.1109/ICCS.1994.474261
