DocumentCode :
2295706
Title :
Design of an optimized grating coupler for thick SOI rib waveguides
Author :
Alonso-Ramos, C. ; Ortega-Moñux, A. ; Molina-Fernández, I. ; Cheben, P. ; Zavargo-Peche, L. ; Halir, R. ; Kim, N. ; Janz, S. ; Xu, D. -X
Author_Institution :
Dept. Ing. de Comun., Univ. de Malaga, Málaga, Spain
fYear :
2011
fDate :
18-20 May 2011
Firstpage :
1
Lastpage :
3
Abstract :
The use of grating couplers for fiber to chip coupling is a promising technique, allowing wafer scale testing with no need for facet preparation. Albeit grating couplers have been extensively studied for Si-wire waveguides, the implementation on SOI micrometric rib waveguides remains challenging, mainly due to excitation of higher order modes. In this work we show for the first time that monomode excitation of the grating can be achieved by properly designing the access waveguide. With the proposed approach the circuit can be fabricated using standard i-line stepper litography with a single etch step. The optimized design for a 1.5μm thick silicon layer achieves a simulated coupling efficiency of 65.6% at 1.55μm. Preliminary experimental results yield a coupler loss of 4dB.
Keywords :
diffraction gratings; etching; integrated optics; lithography; optical couplers; optical design techniques; optical fabrication; optical losses; optical waveguides; rib waveguides; silicon-on-insulator; SOI micrometric rib waveguides; Si; Si-wire waveguides; albeit grating couplers; coupler loss; etching; fiber-to-chip coupling; higher order modes; monomode excitation; optimized grating coupler design; size 1.5 mum; standard i-line stepper lithography; thick silicon layer; wafer scale testing; wavelength 1.55 mum; Couplers; Couplings; Gratings; Integrated circuit interconnections; Optical waveguides; Optimized production technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Information Photonics (IP), 2011 ICO International Conference on
Conference_Location :
Ottawa, ON
Print_ISBN :
978-1-61284-315-5
Type :
conf
DOI :
10.1109/ICO-IP.2011.5953789
Filename :
5953789
Link To Document :
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