Title :
Two-Dimensional Physical and Numerical Modelling of InP-based Heterojunction Bipolar Transistors
Author :
Tauqeer, T. ; Sexton, J. ; Amir, F. ; Missous, M.
Author_Institution :
Sch. of Electr. Eng. & Electron., Univ. of Manchester, Manchester
Abstract :
State-of-the-art HBTs were designed, grown, fabricated and characterized in-house. The novelty of this process was the use of dimeric phosphorus generated from a Gallium Phosphide (GaP) decomposition source, which permitted growth at a fairly low temperature (420degC) while conserving extremely high quality materials. A self-aligned transistor with an emitter area of 5times5 mum2 demonstrated a low offset voltage of 150 mV and high current gain of 90. An excellent agreement with the measured data was achieved using physical modelling packages developed by SILVACO.
Keywords :
gallium compounds; heterojunction bipolar transistors; indium compounds; GaP; HBT; InP; SILVACO; decomposition source; dimeric phosphorus; heterojunction bipolar transistors; self-aligned transistor; temperature 420 degC; two-dimensional numerical modelling; two-dimensional physical modelling; voltage 150 mV; Analytical models; Charge carrier processes; Doping; Electron mobility; Heterojunction bipolar transistors; Indium gallium arsenide; Indium phosphide; Numerical models; Semiconductor process modeling; Temperature;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2008. ASDAM 2008. International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4244-2325-5
Electronic_ISBN :
978-1-4244-2326-2
DOI :
10.1109/ASDAM.2008.4743335