Kinoform optical elements in fused silica for high-power laser optics

Author

Soldatenkov, I.S. ; Atuchin, V.V. ; Kirpichnikov, A.V. ; Mikhailov, E.V. ; Sheglov, D.V.

Author_Institution

Lab. of Opt. Mater. & Struct., Inst. of Semicond. Phys., Novosibirsk, Russia

fYear

2003

fDate

19-20 Sept. 2003

Firstpage

227

Lastpage

229

Abstract

Diffractive phase optical elements or kinoforms are receiving marked attention in the recent years because of unconventional light wave transformations that can be realized with its using. Kinoform element function is specified by prescribed surface relief profile with the depth typically defined in the parts of micrometer scale. Usage of improved manufacturing techniques, such as photolithography and ion-beam etching, greatly upgrade the microrelief accuracy. This study considers the method of fabrication of multilevel kinoform microlens arrays in silica substrates feasible for processing of high-power laser beams and the observation of its geometry and optical characteristics.

Keywords

computer-generated holography; diffractive optical elements; laser beams; microlenses; optical arrays; optical fabrication; silicon compounds; diffractive phase optical elements; fused silica substrates; high-power laser beams processing; high-power laser optics; kinoform optical elements; multilevel kinoform microlens arrays fabrication; optical characteristics; optical element geometry; surface relief profile; Etching; Lenses; Lithography; Manufacturing; Microoptics; Optical arrays; Optical device fabrication; Optical diffraction; Optical surface waves; Silicon compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Laser and Fiber-Optical Networks Modeling, 2003. Proceedings of LFNM 2003. 5th International Workshop on

Print_ISBN

0-7803-7709-5

Type

conf

DOI

10.1109/LFNM.2003.1246134

Filename

1246134