Equivalent Electrical Modeling and Simulation of MEMS Comb Accelerometer

An equivalent electrical model of the MEMS comb accelerometer is presented in this paper, including the readout interface circuit. The accelerometer has only one proof mass, symmetrically suspended by four cantilevers. The displacement change of the proof mass is converted to the change of differential capacitance between the proof mass and adjacent fixed electrodes. In order to establish the mechanical characteristics of the accelerometer in this equivalent electrical model, we use the so-called analog behavioral modeling library to describe the mechanical part of the system. Through combining the electrical model of the acceleration sensor and the readout interface circuit, we get the system-level model of the MEMS comb accelerometer. The simulation results are in good accordance with theoretical analysis.