Investigation of low pressure discharge generated by magnetron plasma device

Results of experimental and theoretical analysis of plasma discharge in planar DC magnetron are considered in this report. The device was developed for modeling of plasma/wall interaction in International Thermonuclear Experimental Reactor (ITER). Experiments were performed using both hydrogen and argon as working medium in pressure range of 10^-3-2.10^-2 torr. Beryllium was material of sputtered cathode in order to phenomena on ITER beryllium first wall protection. Voltage-current contributions of the discharge were obtained for different hydrogen pressures and magnetic field induction near the cathode surface. The discharge voltage in case of hydrogen medium was about one half of that obtained for argon for equal total current. Apparently it is caused by beryllium using as a cathode material. Processes of beryllium erosion and following redeposition of sputtered beryllium atoms on surfaces of the target and vacuum chamber walls were observed and investigated. Some aspects of applying of such magnetrons for producing of thin beryllium coatings and films are also considered in the report