Title :
CMOS-MEMS variable capacitors with low parasitic capacitance for frequency-reconfigurable RF circuits
Author :
Reinke, John ; Jajoo, Abhishek ; Wang, Leon ; Fedder, Gary ; Mukherjee, Tamal
Author_Institution :
Dept. of ECE, Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
The design and characterization of a CMOS-MEMS variable capacitor is presented. Measured results demonstrate a tuning ratio of 6.9:1, a quality factor of 28 at 3 GHz, and a self-resonant frequency of 11 GHz, with sub-50 fF parasitic capacitance. Simulations of two frequency-reconfigurable circuits, a low-noise amplifier and a power amplifier, show the importance of low parasitic capacitance for practical reconfigurable front-end designs.
Keywords :
CMOS integrated circuits; Q-factor; capacitors; low noise amplifiers; micromechanical devices; power amplifiers; radiofrequency integrated circuits; CMOS-MEMS variable capacitors; RF circuits; frequency 11 GHz; frequency 3 GHz; frequency-reconfigurable circuits; low noise amplifier; low parasitic capacitance; power amplifier; quality factor; Capacitance measurement; Capacitors; Circuit optimization; Circuit simulation; Frequency measurement; Low-noise amplifiers; Parasitic capacitance; Q factor; Radio frequency; Tuning; Capacitors; Q factor; electrothermal effects; microelectromechanical devices; tunable amplifiers;
Conference_Titel :
Radio Frequency Integrated Circuits Symposium, 2009. RFIC 2009. IEEE
Conference_Location :
Boston, MA
Print_ISBN :
978-1-4244-3377-3
Electronic_ISBN :
1529-2517
DOI :
10.1109/RFIC.2009.5135591
