Title :
Compliant MEMS and their use in optical components
Author_Institution :
Solus Micro Technol., Westlake Village, CA, USA
Abstract :
We have developed a new branch of MEMS devices that use a very compliant material for the bending/twisting member. This use of an elastomer suspension system significantly widens the design and performance spaces for MEMS devices. We have designed several new microoptical devices based on this new MEMS platform and have gone through prototype development on the first of these new designs, a tunable Fabry-Perot. This new MEMS tunable filter establishes a new state of the art performance level for tunability and finesse.
Keywords :
micro-optics; micromechanical devices; optical filters; optical tuning; MEMS devices; MEMS platform; MEMS tunable filter; bending/twisting member; compliant MEMS; compliant material; elastomer suspension system; finesse; microoptical devices; optical components; performance spaces; prototype development; tunable Fabry Perot; Etching; Fiber lasers; Micromechanical devices; Optical devices; Optical reflection; Optical sensors; Optical switches; Optical waveguides; Photonic crystals; Waveguide lasers;
Conference_Titel :
Optical Fiber Communication Conference and Exhibit, 2002. OFC 2002
Print_ISBN :
1-55752-701-6
DOI :
10.1109/OFC.2002.1036229
