Title :
Integrated Si3N4/SiO2 ultra high Q ring resonators
Author :
Spencer, Daryl T. ; Tang, Yongbo ; Bauters, Jared F. ; Heck, Martijn J R ; Bowers, John E.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California Santa Barbara, Santa Barbara, CA, USA
Abstract :
We demonstrate a Si3N4 waveguide optical resonator with a record high quality factor of 55 million using planar waveguide couplers. Investigations into coupler losses are studied to further increase performance.
Keywords :
Q-factor; optical planar waveguides; optical resonators; silicon compounds; Si3N4-SiO2; coupler losses; integrated ultra high Q ring resonators; planar waveguide couplers; quality factor; waveguide optical resonator; Couplers; Couplings; Microwave filters; Optical losses; Optical ring resonators; Optical waveguides;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358529