Title :
Vertical coupling for silicon nitride waveguides using silicon grating couplers and transitions
Author :
Xiao, Zhe ; Luan, Feng ; Liow, Tsung-Yang ; Zhang, Jing ; Shum, Ping
Abstract :
Fiber to silicon nitride waveguides coupling is achieved using silicon grating coupler with a transition. Two optimized couplers are designed for TE and TM mode excitation, achieving over 55% efficiency. Fabrication issues are also discussed.
Keywords :
diffraction gratings; optical fibre couplers; optical fibre fabrication; optical waveguides; silicon; silicon compounds; Si; SiN; TE mode excitation; TM mode excitation; fiber waveguides; optimized couplers; silicon grating couplers; silicon grating transitions; silicon nitride waveguides coupling; vertical coupling; Couplers; Couplings; Fabrication; Gratings; Optical fiber couplers; Silicon; Integrated photonics; coupler; grating; planar waveguide;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358561
