Analog tunable diffractive grating with milliradian resolution

Author

Shih, Wei-Chuan ; Wong, Chee Wei ; Jeon, Yong Bae ; Kim, Sang-Gook ; Schmidt, Martin A. ; Desai, Salil ; Freeman, Dennis M. ; Sinha, Arnab ; Nielson, Gregory ; Barbastathis, George

Author_Institution

Microsystems Technol. Lab., MIT, Cambridge, MA, USA

fYear

2002

fDate

17-22 Mar 2002

Firstpage

189

Lastpage

190

Abstract

We have designed and fabricated two versions of analog tunable grating. The extrapolated performance of the device is a wide tunable range between sub-nanometer and sub-micrometer with actuation voltage below 100 Volts by electrostatic actuation or 5 Volts by the piezoelectric version. We have demonstrated the preliminary function of our designs.

Keywords

diffraction gratings; electrostatic devices; micro-optics; micromechanical devices; optical design techniques; optical fabrication; optical tuning; 100 V; 5 V; actuation voltage; analog tunable diffractive grating; analog tunable grating design; electrostatic actuation; milliradian resolution; optical MEMS devices; piezoelectric version; sub-micrometer; sub-nanometer; wide tunable range; Bit error rate; Gratings; Laser tuning; Micromechanical devices; Optical design; Optical filters; Optical modulation; Optical tuning; Tunable circuits and devices; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Fiber Communication Conference and Exhibit, 2002. OFC 2002

Print_ISBN

1-55752-701-6

Type

conf

DOI

10.1109/OFC.2002.1036296

Filename

1036296