Title :
Chemically-etched ultra-high-Q micro-cavities on a silicon chip
Author :
Chen, Tong ; Lee, Hansuek ; Li, Jiang ; Vahala, Kerry
Author_Institution :
Thomas J. Watson, Sr., Lab. of Appl. Phys., California Inst. of Technol., Pasadena, CA, USA
Abstract :
Optical resonators with quality factor as high as 875 million are demonstrated. These silicon-chip-based devices are fabricated using only lithography and chemical etching, thereby expanding integration opportunities and possible applications.
Keywords :
Q-factor; elemental semiconductors; etching; integrated optics; micro-optomechanical devices; microcavities; microcavity lasers; microfabrication; micromechanical resonators; optical fabrication; photolithography; silicon; Si; chemically-etched ultrahigh-Q microcavities; lithography; optical resonators; quality factor; silicon chip; silicon-chip-based device; Microcavities; Nonlinear optics; Optical pumping; Optical sensors; Q factor; Scattering; optical resonators; silicon-chip-based devices;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358592
