Title :
Reduced surface roughness with improved imprinting technique for polymer optical components
Author :
Xiaohui Lin ; Hosseini, Amir ; Wang, Alan X. ; Chen, Ray T.
Author_Institution :
Dept. Electr. & Comput. Eng., Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We demonstrate a molding process to imprint optical components on polymer. The hard mold is fabricated by either evaporation or electroplating. The roughness of molded polymer surface is reduced by 5nm compared to those fabricated by ion-etching.
Keywords :
optical elements; optical fabrication; optical polymers; sputter etching; surface roughness; electroplating; evaporation; hard mold; imprinting technique; ion-etching; molded polymer surface; molding process; polymer optical components; reduced surface roughness; Fabrication; Optical surface waves; Polymers; Rough surfaces; Surface roughness; Surface treatment; Surface waves; electron-beam evaporation; electroplating; molding; polymer waveguide; surface roughness;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358601
