Title :
High responsivity, low dark current, large area, heterogenously bonded annular thin-film silicon photodetectors
Author :
Dhar, Sulochana ; Jokerst, Nan M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA
Abstract :
Thin-film crystalline silicon photodiodes with the highest uncooled responsivity to dark current density ratio (0.30-0.54 cm2/nW for λ= 470 nm-600 nm) reported to date are described herein for integrated biomedical imaging and biochemical sensing.
Keywords :
current density; integrated optoelectronics; photodetectors; photodiodes; silicon-on-insulator; thin film devices; Si; biochemical sensing; high uncooled responsivity; integrated biomedical imaging; large area heterogeneously bonded annular thin-film silicon photodetectors; thin-film crystalline silicon photodiodes; wavelength 470 nm to 600 nm; Biomedical optical imaging; Dark current; Photodetectors; Silicon; Substrates; silicon detectors; thin-film devices;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358650
