DocumentCode
2302472
Title
Theoretical Studies Of Plasma Ion Implantation
Author
Jae Koo Lee ; Sang June Hahn
Author_Institution
Pohang Institute of Science & Technology
fYear
1991
fDate
3-5 June 1991
Firstpage
119
Lastpage
119
Keywords
Deuterium; Ion implantation; Neutrons; Nuclear and plasma sciences; Plasma applications; Plasma devices; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Plasma sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location
Williamsburg, VA, USA
Print_ISBN
0-7803-0147-1
Type
conf
DOI
10.1109/PLASMA.1991.695537
Filename
695537
Link To Document