• DocumentCode
    2302486
  • Title

    Low-loss Si-slot waveguides and ring resonator embedded with Benzocyclobutene

  • Author

    Atsumi, Yuki ; Kang, Joonhyun ; Maeda, Yasuna ; Oda, Manabu ; Nishiyama, Nobuhiko ; Arai, Shigehisa

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
  • fYear
    2010
  • fDate
    7-11 Nov. 2010
  • Firstpage
    232
  • Lastpage
    233
  • Abstract
    In order to improve the property of the athermal ring resonator with Si-slot waveguide, a reduction of the propagation loss of a slot waveguide and introduction of a spot-size converter are reported. The propagation loss was measured to be 5.6 dB/cm, which is the lowest value to the best of our knowledge.
  • Keywords
    elemental semiconductors; integrated optics; optical losses; optical resonators; optical waveguides; organic compounds; silicon; Si; benzocyclobutene; embedded ring resonator; low-loss Si-slot waveguides; propagation loss; spot-size converter;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE Photonics Society, 2010 23rd Annual Meeting of the
  • Conference_Location
    Denver, CO
  • ISSN
    -
  • Print_ISBN
    978-1-4244-5368-9
  • Electronic_ISBN
    -
  • Type

    conf

  • DOI
    10.1109/PHOTONICS.2010.5698844
  • Filename
    5698844