• DocumentCode
    2302711
  • Title

    Silicon-based integrated hollow waveguides produced by controlled thin film buckling

  • Author

    Epp, Eric ; Ponnampalam, N. ; Newman, W. ; Drobot, B. ; McFarlane, S. ; McMullin, J.N. ; Meldrum, A. ; DeCorby, R.G.

  • Author_Institution
    Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada
  • fYear
    2010
  • fDate
    7-11 Nov. 2010
  • Firstpage
    258
  • Lastpage
    259
  • Abstract
    We describe planar air-core waveguides with Bragg reflector claddings, fabricated by controlled delamination and buckling of sputtered Si/SiO2 multilayers. We also report preliminary light guiding experiments in the 1550 nm wavelength range.
  • Keywords
    Bragg gratings; buckling; claddings; delamination; elemental semiconductors; optical fabrication; optical multilayers; optical planar waveguides; silicon; silicon compounds; Bragg reflector claddings; Si-SiO2; buckling; controlled thin film buckling; delamination; light guiding; planar air-core waveguides; silicon-based integrated hollow waveguides; sputtered multilayers; wavelength 1550 nm; Hollow Waveguide; Self Assembly;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE Photonics Society, 2010 23rd Annual Meeting of the
  • Conference_Location
    Denver, CO
  • ISSN
    -
  • Print_ISBN
    978-1-4244-5368-9
  • Electronic_ISBN
    -
  • Type

    conf

  • DOI
    10.1109/PHOTONICS.2010.5698857
  • Filename
    5698857
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2302711