Title :
Photonic Integration of nano-electro-mechanical systems
Author :
Li, Mo ; Pernice, Wolfram ; Tang, Hong
Author_Institution :
Dept. of Electr. & Eng., Yale Univ., New Haven, CT, USA
Abstract :
A brand new photonic platform for nanomechanical systems integration is proposed . We are able to overcome all these difficulties of current NEMS by harnessing optical force for device transduction and using integrated photonic circuit for interconnects.
Keywords :
integrated optics; nanoelectromechanical devices; nanophotonics; device transduction; integrated photonic circuit; nano-electro-mechanical systems; optical force; photonic integration; NEMS; gradient optical force; nanophotonics; optomechanics; photonic cantilever;
Conference_Titel :
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-5368-9
DOI :
10.1109/PHOTONICS.2010.5698874
