DocumentCode :
2303074
Title :
Silicon Nitride Thin Film Deposition Using ECR Plasma
Author :
Sun-Kyu Song ; Hong-Young Chang
Author_Institution :
Physics Department, KAIST
fYear :
1991
fDate :
3-5 June 1991
Firstpage :
120
Lastpage :
120
Keywords :
Magnetic films; Nuclear and plasma sciences; Plasma applications; Plasma chemistry; Plasma properties; Plasma sources; Plasma temperature; Plasma transport processes; Silicon; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
Type :
conf
DOI :
10.1109/PLASMA.1991.695541
Filename :
695541
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2303074
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