Title :
Low-loss TiO2 planar waveguides for nanophotonic applications
Author :
Bradley, J.D.B. ; Evans, C.C. ; Parsy, F. ; Phillips, K.C. ; Senaratne, R. ; Marti, E. ; Mazur, E.
Author_Institution :
Sch. of Eng. & Appl. Sci., Harvard Univ., Cambridge, MA, USA
Abstract :
We deposit TiO2 planar waveguides on oxidized silicon substrates by reactive sputtering. The films exhibit Raman spectra consistent with an amorphous or anatase phase and have losses as low as 0.4 dB/cm at 826 nm.
Keywords :
Raman spectra; nanophotonics; optical losses; optical planar waveguides; sputter deposition; thin films; titanium compounds; Raman spectra; TiO2; amorphous phase; anatase phase; low-loss planar waveguides; nanophotonic applications; reactive sputtering;
Conference_Titel :
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-5368-9
DOI :
10.1109/PHOTONICS.2010.5698885
