Title :
Modeling Magnetic Bucket Confinement (415) 121
Author :
Stewart, R.A. ; Troyanovsky, B. ; Lieberman, M.A.
Author_Institution :
University of California
Keywords :
Etching; Inductors; Magnetic confinement; Magnetic resonance; Plasma applications; Plasma confinement; Plasma density; Plasma materials processing; Plasma measurements; Plasma sources;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695542