Title :
Integrations of slanted silicon nanostructures on 3D microstructures and it application in surface enhanced Raman spectroscopy
Author :
Xu, Zhida ; Jiang, Jing ; Gartia, Manas Ranja ; Liu, Gang Logan
Author_Institution :
Micro & Nanotechnol. Lab., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
Abstract :
Black silicon with slanted nanopillar array on planar and microstructure was produced for surface-enhanced Raman spectroscopy (SERS). The angle dependence of etching angle and nanopillar slanted angle was investigated with scanning electron microscopy.
Keywords :
Raman spectroscopy; crystal microstructure; elemental semiconductors; etching; micro-optics; nanophotonics; nanostructured materials; scanning electron microscopy; silicon; surface enhanced Raman scattering; 3D microstructure; SERS; Si; etching angle-dependence; scanning electron microscopy; slanted black silicon nanostructures; slanted nanopillar array; surface enhanced Raman spectroscopy; Etching; Gold; Microstructure; Raman scattering; Silicon; Substrates; Angle-Controllable Nanopillar; Black Silicon; Polarized SERS; Slanted Reaction Ion Etching;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358739
