Title :
Photonic temperature sensor based on an active silicon resonator manufactured using a CMOS process
Author :
Kim, Gun-Duk ; Lee, Hak-Soon ; Kim, Woo-Ju ; Lee, Sang-Shin ; Lim, Boo Tak ; Bae, Hee Kyung ; Lee, Wan-Gyu
Author_Institution :
Dept. of Electron. Eng., Kwangwoon Univ., Seoul, South Korea
Abstract :
A photonic temperature sensor based on an active silicon CMOS resonator was proposed and built. It features a simple measurement scheme, a high sensitivity and a wide operation range.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optics; optical resonators; optical sensors; silicon; temperature sensors; CMOS process; Si; active silicon resonator; photonic temperature sensor; silicon photonic devices;
Conference_Titel :
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-5368-9
DOI :
10.1109/PHOTONICS.2010.5698905
