Title :
An Atomic Physics Model In a particle-in-cell code for stimulating plasma processing
Author :
Rognlien, T.D. ; Hiskes, J.R. ; Cohen, R.H. ; Lieberman, M.A. ; Vahedi, V. ; Birdsall, C.K.
Author_Institution :
Lawrence Livermore National Laboratory
Keywords :
Analytical models; Atmospheric modeling; Atomic layer deposition; Physics; Plasma accelerators; Plasma materials processing; Plasma measurements; Plasma simulation; Plasma transport processes; Radio frequency;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695545
