• DocumentCode
    2303966
  • Title

    Studies On Transport Of Sputtered Atoms in Plasma Sputter-Deposition Systems

  • Author

    Moreno-Marin, J.C. ; Athavale, S. ; Gras-Marti, A. ; Auciello, O.

  • Author_Institution
    N.C. State Univ.
  • fYear
    1991
  • fDate
    3-5 June 1991
  • Firstpage
    122
  • Lastpage
    122
  • Keywords
    Analytical models; Atmospheric modeling; Atomic layer deposition; Plasma accelerators; Plasma materials processing; Plasma measurements; Plasma sheaths; Plasma simulation; Plasma transport processes; Radio frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
  • Conference_Location
    Williamsburg, VA, USA
  • Print_ISBN
    0-7803-0147-1
  • Type

    conf

  • DOI
    10.1109/PLASMA.1991.695546
  • Filename
    695546
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2303966