DocumentCode
2304011
Title
Low dark current Ge PIN photodiode for a high-performance, photonic BiCMOS process for radio-over-fiber applications
Author
Lischke, S. ; Knoll, D. ; Zimmermann, L. ; Yamamoto, Y. ; Fraschke, M. ; Trusch, A. ; Krüger, A. ; Kroh, M. ; Tillack, B.
Author_Institution
IHP, Frankfurt (Oder), Germany
fYear
2012
fDate
23-27 Sept. 2012
Firstpage
628
Lastpage
629
Abstract
A waveguide coupled Ge PIN photodiode showing 0.7A/W responsivity and 13GHz optical bandwidth at a low dark current of 12mA/cm2 is presented. Its unique features facilitate integration in a high-performance, photonic BiCMOS process.
Keywords
BiCMOS integrated circuits; elemental semiconductors; germanium; integrated optoelectronics; optical waveguides; p-i-n photodiodes; photodetectors; Ge; bandwidth 13 GHz; high-performance photonic BiCMOS process; low dark current Ge PIN photodiode; optical bandwidth; radio-over-fiber applications; waveguide coupled Ge PIN photodiode; BiCMOS integrated circuits; Dark current; Fabrication; Optical waveguides; Photodiodes; Photonics; Silicon; BiCMOS; Ge photodiode;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (IPC), 2012 IEEE
Conference_Location
Burlingame, CA
Print_ISBN
978-1-4577-0731-5
Type
conf
DOI
10.1109/IPCon.2012.6358778
Filename
6358778
Link To Document