Title :
Heterogeneous integration for optical MEMS
Author :
Fischer, A. ; Forsberg, F. ; Lapisa, M.A. ; Roxhed, N. ; Stemme, G. ; Zimmer, F. ; Niklaus, F.
Author_Institution :
Microsyst. Technol. Lab., KTH-R. Inst. of Technol., Stockholm, Sweden
Abstract :
In this paper we present different large-scale heterogeneous integration technologies for optical MEMS that enable the integration of optical MEMS with standard CMOS-based ICs. Examples that are presented include various mono-crystalline silicon micro-mirror arrays and infrared bolometer arrays.
Keywords :
CMOS integrated circuits; bolometers; elemental semiconductors; integrated optoelectronics; micro-optomechanical devices; micromirrors; silicon; Si; heterogeneous integration; infrared bolometer arrays; large-scale heterogeneous integration technology; monocrystalline silicon micromirror arrays; optical MEMS; standard CMOS IC; MEMS; MOEMS; More-than-Moore; micro-opto-electromechanical system; photonics integration; self assembly; wafer-level heterogeneous integration; wafer-scale IC integration;
Conference_Titel :
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-5368-9
DOI :
10.1109/PHOTONICS.2010.5698973
