DocumentCode
2304911
Title
Heterogeneous integration for optical MEMS
Author
Fischer, A. ; Forsberg, F. ; Lapisa, M.A. ; Roxhed, N. ; Stemme, G. ; Zimmer, F. ; Niklaus, F.
Author_Institution
Microsyst. Technol. Lab., KTH-R. Inst. of Technol., Stockholm, Sweden
fYear
2010
fDate
7-11 Nov. 2010
Firstpage
487
Lastpage
488
Abstract
In this paper we present different large-scale heterogeneous integration technologies for optical MEMS that enable the integration of optical MEMS with standard CMOS-based ICs. Examples that are presented include various mono-crystalline silicon micro-mirror arrays and infrared bolometer arrays.
Keywords
CMOS integrated circuits; bolometers; elemental semiconductors; integrated optoelectronics; micro-optomechanical devices; micromirrors; silicon; Si; heterogeneous integration; infrared bolometer arrays; large-scale heterogeneous integration technology; monocrystalline silicon micromirror arrays; optical MEMS; standard CMOS IC; MEMS; MOEMS; More-than-Moore; micro-opto-electromechanical system; photonics integration; self assembly; wafer-level heterogeneous integration; wafer-scale IC integration;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location
Denver, CO
ISSN
-
Print_ISBN
978-1-4244-5368-9
Electronic_ISBN
-
Type
conf
DOI
10.1109/PHOTONICS.2010.5698973
Filename
5698973
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