Title :
Green light-induced annealing of As2S3 thin films and its impact on waveguides performance
Author :
Choi, Duk-Yong ; Madden, Steve ; Rode, Andrei ; Wang, Rongping ; Bulla, Douglas ; Luther-Davies, Barry
Author_Institution :
Centre for Ultra-high Bandwidth Devices & Opt. Syst. (CUDOS), Australian Nat. Univ., Canberra, ACT, Australia
Abstract :
We present the application of photo-induced structural change in As2S3 films and its impact on waveguide performance. Light annealing is an efficient way for making the film homogeneous, hence for low-loss guides.
Keywords :
annealing; arsenic compounds; chalcogenide glasses; optical waveguides; radiation effects; semiconductor thin films; As2S3; green light-induced annealing; low-loss guides; photo-induced structural change; thin films; waveguides;
Conference_Titel :
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-5368-9
DOI :
10.1109/PHOTONICS.2010.5699019