Optical emission studies of diamond growth species in the shower microplasmas generated by using diamond cathodes

Author

Shiu-Cheng Lou ; Kunuku, Srinivasu ; Chulung Chen ; Keh-Chyang Leou ; I-Nan Lin

Author_Institution

Dept. of Photonics Eng., Yuan-Ze Univ., Chungli, Taiwan

fYear

2014

fDate

6-10 July 2014

Firstpage

51

Lastpage

52

Abstract

In this study we have fabricated shower kind of microplasma using diamond coated molybdenum (Mo) as a cathode (which contains the 1 mm holes) separated by copper anode at 1mm. Three kind of diamond films deposited in microwave plasma enhanced chemical vapor deposition process. Pulsed bipolar DC source has applied to attain the gas discharges between the electrodes and the plasma pushed out of cathode holes appears like plasma showers. Due to applied high electric fields the showers are high in intense with high plasma density. Optical emission spectroscopy utilized to characterize the plasma of different gas compositions, which are used to grow the diamond films.

Keywords

cathodes; diamond; discharges (electric); electrodes; plasma CVD; plasma density; plasma devices; plasma diagnostics; plasma sources; thin films; C; Mo; copper anode; diamond cathode; diamond coated molybdenum; diamond films; diamond growth; electrodes; gas composition; gas discharges; microplasma shower; microwave plasma enhanced chemical vapor deposition; molybdenum substrates; optical emission spectroscopy; plasma density; plasma device; pulsed bipolar DC source; Cathodes; Current measurement; Optical films; Plasma measurements; Cathode; Diamond; Microplasma; OES;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference (IVNC), 2014 27th International

Conference_Location

Engelberg

Print_ISBN

978-1-4799-5306-6

Type

conf

DOI

10.1109/IVNC.2014.6894754

Filename

6894754