Title :
K-band loss characterization of electroplated nickel for RF MEMS devices
Author :
Hsu, Hao-Han ; Lee, Sang Woo ; Peroulis, Dimitrios
Author_Institution :
Purdue Univ., West Lafayette
Abstract :
A group of sputtered gold and electroplated nickel CPW lines are fabricated to investigate electrical behaviors of nickel at K-band. DC resistance and scattering parameters of these lines are measured and compared with analytic models and HFSS simulation. Permeability of electroplated nickel at k-band is evaluated by curve-fitting techniques and this will be useful in characterization and design of electroplated nickel RF-MEMS.
Keywords :
S-parameters; coplanar waveguides; curve fitting; electroplating; gold; micromechanical devices; nickel; permeability; sputter deposition; Au; CPW lines; DC resistance; HFSS simulation; K-band loss characterization; Ni; RF MEMS devices; curve-fitting techniques; electroplated nickel; permeability; scattering parameters; sputtered gold; Analytical models; Coplanar waveguides; Electric resistance; Electrical resistance measurement; Gold; K-band; Nickel; Permeability; Radiofrequency microelectromechanical systems; Scattering parameters;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2007 IEEE
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-0877-1
Electronic_ISBN :
978-1-4244-0878-8
DOI :
10.1109/APS.2007.4395487
