• DocumentCode
    230684
  • Title

    Development of microplasma based UV sources using diamond nanostructured cathodes

  • Author

    Kunuku, Srinivasu ; Shiu-Cheng Lou ; Chulung Chen ; Keh-Chyang Leou ; I-Nan Lin

  • Author_Institution
    Dept. of Eng. & Syst. Sci., Nat. Tsing-Hua Univ., Hsinchu, Taiwan
  • fYear
    2014
  • fDate
    6-10 July 2014
  • Firstpage
    165
  • Lastpage
    166
  • Abstract
    In this study we have developed a near Ultra Violet (NUV) source by using discharge of Ar + N2 gas mixture with employ of DC power source. The cathode materials play vital role in efficiency and lifetime of UV sources, which are attained from micro-discharges of various gas compositions. In the present study, micro discharges are conducted in the cavity, which have been architecture by using cylindrical diamond nanotips cathode and ITO coated glass anode. The NUV emission (330 to 400 nm) from the N2 (C-B transition) observed at pressure of 10 torr by applying the DC power of 30-120 mW. The NUV emissions have collected by optical emission spectrometer. The NUV emission intensities increased as function of power at constant pressure. Moreover the devices tested at low pressures and powers in non-harsh gas environment.
  • Keywords
    argon; cathodes; diamond; discharges (electric); gas mixtures; glass; indium compounds; nanostructured materials; nitrogen; plasma diagnostics; plasma sources; C; DC power; DC power source; ITO coated glass anode; ITO-SiO2; argon-nitrogen gas mixtures; cathode material; constant pressure; cylindrical diamond nanotips cathode; diamond nanostructured cathodes; gas composition; microdischarge; microplasma based UV sources; near ultraviolet emission source; optical emission spectrometry; power 30 mW to 120 mW; power function; pressure 10 torr; Cathodes; Discharges (electric); Fault location; Indium tin oxide; Optical films; Thickness measurement; Diamond cathodes; Microplasma; Optical emission spectrum; UV Source;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2014 27th International
  • Conference_Location
    Engelberg
  • Print_ISBN
    978-1-4799-5306-6
  • Type

    conf

  • DOI
    10.1109/IVNC.2014.6894794
  • Filename
    6894794