Title :
Cold cathode, high current electron source for microwave tube devices using Micro Hollow Cathode Discharge (MHCD)
Author :
Wong, Michel C. ; Hunt, Charles E. ; Quan Hu
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California, Davis, Davis, CA, USA
Abstract :
Micro Hollow Cathode Discharge (MHCD), a technology well known as an ion source, is adapted using Argon to be a cold-cathode electron beam source for applications such as microwave tubes amplifier, which require high total current and high current density. To enable using the MHCD as the electron resource for a microwave tube devices, a focus system has been designed, incorporating an electrostatic lens with three stages ranging up to 2 kV. The lens stages incorporate differential pumping in order to reduce the pressure to the order of 10-7 Pa as needed for a microwave tube. The apertures between stages are positioned at the minimal-diameter points of the beam in order to enable maximum pressure isolation between stages. Measured data and beam-focusing simulations indicate that using a 4mm-diameter cathode, operating at 480mTorr, a current density of 10.19 A/cm2 can be obtained. Data from 8mm, 11mm and 16mm diameter MHCDs have also been measured showing an increase in current density with decreasing cathode diameter.
Keywords :
argon; cathodes; electron sources; electrostatic lenses; microwave amplifiers; microwave tubes; vacuum microelectronics; Ar; MHCD technology; beam-focusing simulation; cold-cathode electron beam source; differential pumping; electrostatic lens; high current electron source; ion source; maximum pressure isolation; micro hollow cathode discharge; microwave tube device; microwave tubes amplifier; size 11 mm; size 16 mm; size 4 mm; size 8 mm; Anodes; Apertures; Cathodes; Educational institutions; Materials; MHCD; Micro Hollow Cathode Discharge; atmospheric; electron sources; microwave amplifiers; plasma;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2014 27th International
Conference_Location :
Engelberg
Print_ISBN :
978-1-4799-5306-6
DOI :
10.1109/IVNC.2014.6894808