DocumentCode
230721
Title
Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge
Author
Grzebyk, Tomasz ; Gorecka-Drzazga, Anna ; Dziuban, Jan A. ; Maamari, Khodr ; An, Sanghyuk ; Dankovic, Tatjana ; Feinerman, Alan ; Busta, Heinz
Author_Institution
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wrocław, Poland
fYear
2014
fDate
6-10 July 2014
Firstpage
206
Lastpage
207
Abstract
This paper describes the use of a miniature Pirani pressure sensor to measure the properties of a miniature vacuum pump. The construction and fabrication process of the integrated device is presented. Results of characterization of both MEMS devices performed separately in reference vacuum system and after their integration are shown.
Keywords
micropumps; microsensors; pressure measurement; pressure sensors; vacuum pumps; MEMS devices; MEMS-type Pirani pressure gauge; MEMS-type vacuum pump; miniature Pirani pressure sensor; miniature vacuum pump; reference vacuum system; Containers; Micropumps; Performance evaluation; on-chip integration; vacuum micropump; vacuum microsensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference (IVNC), 2014 27th International
Conference_Location
Engelberg
Print_ISBN
978-1-4799-5306-6
Type
conf
DOI
10.1109/IVNC.2014.6894811
Filename
6894811
Link To Document