Title :
Current limitation in large-area self-aligned gated field emission arrays
Author :
Fomani, Arash A. ; Swanwick, M.E. ; Velasquez-Garcia, L.F. ; Akinwande, Akintunde Ibitayo
Author_Institution :
Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
The emission current of Pt-coated self-aligned gated tip arrays deviates from FN behavior at current levels above 100 nA/tip. The space charge force on emitting electrons has been calculated for the worst-case scenario in which the electrons are emitted from a single point and travel to the anode along the same trajectory. It is suggested that the current limitation is most likely due to limitation in supply of electrons rather than the space charge effect.
Keywords :
electron field emission; platinum; space charge; Pt; Pt-coated self-aligned gated tip arrays; emission current; emitting electrons; large-area field emission arrays; self-aligned gated field emission arrays; space charge force; Cathodes; Current density; Force; Logic gates; Power capacitors; Silicon; Space charge; field emission arrays; high current cathodes; space charge limitation; supply limitation;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2014 27th International
Conference_Location :
Engelberg
Print_ISBN :
978-1-4799-5306-6
DOI :
10.1109/IVNC.2014.6894825
