DocumentCode :
2308533
Title :
The Ion Distribution Function in Weakly Collisional Sheaths
Author :
Hamaguchi, S. ; Dalvie, M. ; Farouki, R.T.
Author_Institution :
IBM
fYear :
1991
fDate :
3-5 June 1991
Firstpage :
137
Lastpage :
138
Keywords :
Distribution functions; Etching; Fabrication; Plasma applications; Plasma density; Plasma devices; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma simulation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
Type :
conf
DOI :
10.1109/PLASMA.1991.695587
Filename :
695587
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2308533
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