DocumentCode

2308565

Title

A Monte Carlo-fluid Hybrid Model Of Pristine And Contaminated Rf Discharges

Author

Sommerer, T.J. ; McCaughey ; Kushner, Mark J.

Author_Institution

University of Illinois

fYear

1991

fDate

3-5 June 1991

Firstpage

138

Lastpage

139

Keywords

Electrons; Etching; Kinetic theory; Plasma applications; Plasma materials processing; Plasma sheaths; Plasma simulation; Radio frequency; Shadow mapping; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on

Conference_Location

Williamsburg, VA, USA

Print_ISBN

0-7803-0147-1

Type

conf

DOI

10.1109/PLASMA.1991.695589

Filename

695589