Title :
A Monte Carlo-fluid Hybrid Model Of Pristine And Contaminated Rf Discharges
Author :
Sommerer, T.J. ; McCaughey ; Kushner, Mark J.
Author_Institution :
University of Illinois
Keywords :
Electrons; Etching; Kinetic theory; Plasma applications; Plasma materials processing; Plasma sheaths; Plasma simulation; Radio frequency; Shadow mapping; Shape;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695589
